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Sensors 2011, 11(3), 3135-3144; doi:10.3390/s110303135

A High Temperature Capacitive Humidity Sensor Based on Mesoporous Silica

1,* , 2
4 and 1
Received: 30 January 2011 / Revised: 20 February 2011 / Accepted: 25 February 2011 / Published: 14 March 2011
(This article belongs to the Special Issue Gas Sensors - 2010)
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Capacitive sensors are the most commonly used devices for the detection of humidity because they are inexpensive and the detection mechanism is very specific for humidity. However, especially for industrial processes, there is a lack of dielectrics that are stable at high temperature (>200 °C) and under harsh conditions. We present a capacitive sensor based on mesoporous silica as the dielectric in a simple sensor design based on pressed silica pellets. Investigation of the structural stability of the porous silica under simulated operating conditions as well as the influence of the pellet production will be shown. Impedance measurements demonstrate the utility of the sensor at both low (90 °C) and high (up to 210 °C) operating temperatures.
Keywords: capacitive sensor; humidity; high temperature; mesoporous silica capacitive sensor; humidity; high temperature; mesoporous silica
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Wagner, T.; Krotzky, S.; Weiß, A.; Sauerwald, T.; Kohl, C.-D.; Roggenbuck, J.; Tiemann, M. A High Temperature Capacitive Humidity Sensor Based on Mesoporous Silica. Sensors 2011, 11, 3135-3144.

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