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A High Temperature Capacitive Humidity Sensor Based on Mesoporous Silica
Department of Chemistry, Faculty of Science, University of Paderborn, Warburger Str. 100, D-33098 Paderborn, Germany
Max-Planck-Institute for Solid State Research, Nanoscale Science Department, Heisenbergstr. 1, D-70569 Stuttgart, Germany
Institute for Applied Physics, Justus Liebig University, Heinrich-Buff-Ring 16, D-35390 Giessen, Germany
Institute of Inorganic and Analytical Chemistry, Justus Liebig University, Heinrich-Buff-Ring 16, D-35390 Giessen, Germany
* Author to whom correspondence should be addressed.
Received: 30 January 2011; in revised form: 20 February 2011 / Accepted: 25 February 2011 / Published: 14 March 2011
Abstract: Capacitive sensors are the most commonly used devices for the detection of humidity because they are inexpensive and the detection mechanism is very specific for humidity. However, especially for industrial processes, there is a lack of dielectrics that are stable at high temperature (>200 °C) and under harsh conditions. We present a capacitive sensor based on mesoporous silica as the dielectric in a simple sensor design based on pressed silica pellets. Investigation of the structural stability of the porous silica under simulated operating conditions as well as the influence of the pellet production will be shown. Impedance measurements demonstrate the utility of the sensor at both low (90 °C) and high (up to 210 °C) operating temperatures.
Keywords: capacitive sensor; humidity; high temperature; mesoporous silica
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MDPI and ACS Style
Wagner, T.; Krotzky, S.; Weiß, A.; Sauerwald, T.; Kohl, C.-D.; Roggenbuck, J.; Tiemann, M. A High Temperature Capacitive Humidity Sensor Based on Mesoporous Silica. Sensors 2011, 11, 3135-3144.
Wagner T, Krotzky S, Weiß A, Sauerwald T, Kohl C-D, Roggenbuck J, Tiemann M. A High Temperature Capacitive Humidity Sensor Based on Mesoporous Silica. Sensors. 2011; 11(3):3135-3144.
Wagner, Thorsten; Krotzky, Sören; Weiß, Alexander; Sauerwald, Tilman; Kohl, Claus-Dieter; Roggenbuck, Jan; Tiemann, Michael. 2011. "A High Temperature Capacitive Humidity Sensor Based on Mesoporous Silica." Sensors 11, no. 3: 3135-3144.