Sensors 2011, 11(3), 2580-2591; doi:10.3390/s110302580
Article

Development of Micro-Heaters with Optimized Temperature Compensation Design for Gas Sensors

1email, 2email, 2email, 2,* email and 1,* email
Received: 11 January 2011; in revised form: 15 February 2011 / Accepted: 15 February 2011 / Published: 1 March 2011
(This article belongs to the Section Physical Sensors)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: One of the key components of a chemical gas sensor is a MEMS micro-heater. Micro-heaters are used in both semiconductor gas sensors and NDIR gas sensors; however they each require different heat dissipation characteristics. For the semiconductor gas sensors, a uniform temperature is required over a wide area of the heater. On the other hand, for the NDIR gas sensor, the micro-heater needs high levels of infrared radiation in order to increase sensitivity. In this study, a novel design of a poly-Si micro-heater is proposed to improve the uniformity of heat dissipation on the heating plate. Temperature uniformity of the micro-heater is achieved by compensating for the variation in power consumption around the perimeter of the heater. With the power compensated design, the uniform heating area is increased by 2.5 times and the average temperature goes up by 40 °C. Therefore, this power compensated micro-heater design is suitable for a semiconductor gas sensor. Meanwhile, the poly-Si micro-heater without compensation shows a higher level of infrared radiation under equal power consumption conditions. This indicates that the micro-heater without compensation is more suitable for a NDIR gas sensor. Furthermore, the micro-heater shows a short response time of less than 20ms, indicating a very high efficiency of pulse driving.
Keywords: micro-heater; micro-hotplate; NDIR gas sensor; semiconductor gas sensor; uniform heating characteristics; infrared radiation
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MDPI and ACS Style

Hwang, W.-J.; Shin, K.-S.; Roh, J.-H.; Lee, D.-S.; Choa, S.-H. Development of Micro-Heaters with Optimized Temperature Compensation Design for Gas Sensors. Sensors 2011, 11, 2580-2591.

AMA Style

Hwang W-J, Shin K-S, Roh J-H, Lee D-S, Choa S-H. Development of Micro-Heaters with Optimized Temperature Compensation Design for Gas Sensors. Sensors. 2011; 11(3):2580-2591.

Chicago/Turabian Style

Hwang, Woo-Jin; Shin, Kyu-Sik; Roh, Ji-Hyoung; Lee, Dae-Sung; Choa, Sung-Hoon. 2011. "Development of Micro-Heaters with Optimized Temperature Compensation Design for Gas Sensors." Sensors 11, no. 3: 2580-2591.

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