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Sensors 2011, 11(12), 11206-11234; doi:10.3390/s111211206

Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer

National Key Laboratory of Science and Technology on Nano/Micro Fabrication Technology, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, 800 Dongchuan Road, Shanghai 200240, China
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Received: 22 October 2011 / Revised: 16 November 2011 / Accepted: 18 November 2011 / Published: 28 November 2011
(This article belongs to the Section Physical Sensors)
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Abstract

A micromachined electrostatically suspended six-axis accelerometer, with a square plate as proof mass housed by a top stator and bottom stator, is presented. The device structure and related techniques concerning its operating principles, such as calculation of capacitances and electrostatic forces/moments, detection and levitation control of the proof mass, acceleration measurement, and structural parameters design, are described. Hybrid MEMS manufacturing techniques, including surface micromachining fabrication of thin film electrodes and interconnections, integration fabrication of thick nickel structures about 500 μm using UV-LIGA by successful removal of SU-8 photoresist mold, DRIE of silicon proof mass in thickness of 450 μm, microassembly and solder bonding, were employed to fabricate this prototype microdevice. A levitation experiment system for the fabricated microaccelerometer chip is introduced, and levitation results show that fast initial levitation within 10 ms and stable full suspension of the proof mass have been successfully demonstrated.
Keywords: MEMS accelerometer; electrostatic suspension; six-axis; hybrid microfabrication; UV-LIGA; SU-8; levitation MEMS accelerometer; electrostatic suspension; six-axis; hybrid microfabrication; UV-LIGA; SU-8; levitation
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This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Cui, F.; Liu, W.; Chen, W.; Zhang, W.; Wu, X. Design, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer. Sensors 2011, 11, 11206-11234.

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