Sensors 2011, 11(11), 10615-10623; doi:10.3390/s111110615
Article

All-Optical Frequency Modulated High Pressure MEMS Sensor for Remote and Distributed Sensing

1,* email, 1email and 1,2email
Received: 26 September 2011; in revised form: 27 October 2011 / Accepted: 4 November 2011 / Published: 8 November 2011
(This article belongs to the Section Physical Sensors)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: We present the design, fabrication and characterization of a new all-optical frequency modulated pressure sensor. Using the tangential strain in a circular membrane, a waveguide with an integrated nanoscale Bragg grating is strained longitudinally proportional to the applied pressure causing a shift in the Bragg wavelength. The simple and robust design combined with the small chip area of 1 × 1.8 mm2 makes the sensor ideally suited for remote and distributed sensing in harsh environments and where miniaturized sensors are required. The sensor is designed for high pressure applications up to 350 bar and with a sensitivity of 4.8 pm/bar (i.e., 350 ×105 Pa and 4.8 × 10−5 pm/Pa, respectively).
Keywords: optical sensor; MEMS; Bragg grating
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MDPI and ACS Style

Reck, K.; Thomsen, E.V.; Hansen, O. All-Optical Frequency Modulated High Pressure MEMS Sensor for Remote and Distributed Sensing. Sensors 2011, 11, 10615-10623.

AMA Style

Reck K, Thomsen EV, Hansen O. All-Optical Frequency Modulated High Pressure MEMS Sensor for Remote and Distributed Sensing. Sensors. 2011; 11(11):10615-10623.

Chicago/Turabian Style

Reck, Kasper; Thomsen, Erik V.; Hansen, Ole. 2011. "All-Optical Frequency Modulated High Pressure MEMS Sensor for Remote and Distributed Sensing." Sensors 11, no. 11: 10615-10623.

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