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• Chandrana, C
• Talman, J
• Pan, T
• Roy, S
• Fleischman, A
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• Talman, J
• Pan, T
• Roy, S
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• Talman, J
• Pan, T
• Roy, S
• Fleischman, A

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Sensors 2010, 10(9), 8740-8750; doi:10.3390/s100908740

Article

Design and Analysis of MEMS Based PVDF Ultrasonic Transducers for Vascular Imaging

Chaitanya Chandrana^1,2 , James Talman³ , Tao Pan¹ , Shuvo Roy⁴  and Aaron Fleischman^1,*

¹ Department of BioMedical Engineering, Cleveland Clinic, Cleveland, OH, USA ² Department of Chemical and Biomedical Engineering, Cleveland State Univeristy, Cleveland, OH, USA ³ Offboard Countermeasures Branch, United States Naval Research Laboratory, Wahington, DC, USA ⁴ Department of Bioenginering & Therapeutic Sciences, University of California, San Francisco, CA, USA

* Author to whom correspondence should be addressed.

Received: 29 July 2010; in revised form: 9 September 2010 / Accepted: 13 September 2010 / Published: 21 September 2010

(This article belongs to the Section Physical Sensors)

Download PDF Full-Text [214 KB, uploaded 21 September 2010 11:44 CEST]

Abstract: Polyvinilidene fluoride (PVDF) single-element transducers for high-frequency (> 30 MHz) ultrasound imaging applications have been developed using MEMS (Micro-electro-Mechanical Systems) compatible techniques. Performance of these transducers has been investigated by analyzing the sources and effects of on-chip parasitic capacitances on the insertion-loss of the transducers. Modeling and experimental studies showed that on-chip parasitic capacitances degraded the performance of the transducers and an improved method of fabrication was suggested and new devices were built. New devices developed with minimal parasitic effects were shown to improve the performance significantly. A 1-mm aperture PVDF device developed with minimal parasitic effects has resulted in a reduction of insertion loss of 21 dB compared with devices fabricated using a previous method.

Keywords: ultrasound transducer; high-frequency ultrasound imaging; parasitic capacitance

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