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Sensors 2010, 10(9), 8740-8750; doi:10.3390/s100908740

Design and Analysis of MEMS Based PVDF Ultrasonic Transducers for Vascular Imaging

1 Department of BioMedical Engineering, Cleveland Clinic, Cleveland, OH, USA 2 Department of Chemical and Biomedical Engineering, Cleveland State Univeristy, Cleveland, OH, USA 3 Offboard Countermeasures Branch, United States Naval Research Laboratory, Wahington, DC, USA 4 Department of Bioenginering & Therapeutic Sciences, University of California, San Francisco, CA, USA
* Author to whom correspondence should be addressed.
Received: 29 July 2010 / Revised: 9 September 2010 / Accepted: 13 September 2010 / Published: 21 September 2010
(This article belongs to the Section Physical Sensors)
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Polyvinilidene fluoride (PVDF) single-element transducers for high-frequency (> 30 MHz) ultrasound imaging applications have been developed using MEMS (Micro-electro-Mechanical Systems) compatible techniques. Performance of these transducers has been investigated by analyzing the sources and effects of on-chip parasitic capacitances on the insertion-loss of the transducers. Modeling and experimental studies showed that on-chip parasitic capacitances degraded the performance of the transducers and an improved method of fabrication was suggested and new devices were built. New devices developed with minimal parasitic effects were shown to improve the performance significantly. A 1-mm aperture PVDF device developed with minimal parasitic effects has resulted in a reduction of insertion loss of 21 dB compared with devices fabricated using a previous method.
Keywords: ultrasound transducer; high-frequency ultrasound imaging; parasitic capacitance ultrasound transducer; high-frequency ultrasound imaging; parasitic capacitance
This is an open access article distributed under the Creative Commons Attribution License (CC BY) which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Chandrana, C.; Talman, J.; Pan, T.; Roy, S.; Fleischman, A. Design and Analysis of MEMS Based PVDF Ultrasonic Transducers for Vascular Imaging. Sensors 2010, 10, 8740-8750.

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