Sensors 2010, 10(9), 8173-8184; doi:10.3390/s100908173
Article

Micro Cantilever Movement Detection with an Amorphous Silicon Array of Position Sensitive Detectors

1,* email, 1email, 1email, 1email, 1email, 2email, 2email and 1,* email
Received: 23 June 2010; in revised form: 30 July 2010 / Accepted: 30 August 2010 / Published: 1 September 2010
(This article belongs to the Special Issue Photodetectors and Imaging Technologies)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: The movement of a micro cantilever was detected via a self constructed portable data acquisition prototype system which integrates a linear array of 32 1D amorphous silicon position sensitive detectors (PSD). The system was mounted on a microscope using a metal structure platform and the movement of the 30  µm wide by 400  µm long cantilever was tracked by analyzing the signals acquired by the 32 sensor array electronic readout system and the relevant data algorithm. The obtained results show a linear behavior of the photocurrent relating X and Y movement, with a non-linearity of about 3%, a spatial resolution of less than 2 µm along the lateral dimension of the sensor as well as of less than 3 µm along the perpendicular dimension of the sensor, when detecting just the micro-cantilever, and a spatial resolution of less than 1 µm when detecting the holding structure.
Keywords: amorphous semiconductors; silicon; devices; systems
PDF Full-text Download PDF Full-Text [669 KB, uploaded 21 June 2014 03:09 CEST]

Export to BibTeX |
EndNote


MDPI and ACS Style

Contreras, J.; Costa, D.; Pereira, S.; Fortunato, E.; Martins, R.; Wierzbicki, R.; Heerlein, H.; Ferreira, I. Micro Cantilever Movement Detection with an Amorphous Silicon Array of Position Sensitive Detectors. Sensors 2010, 10, 8173-8184.

AMA Style

Contreras J, Costa D, Pereira S, Fortunato E, Martins R, Wierzbicki R, Heerlein H, Ferreira I. Micro Cantilever Movement Detection with an Amorphous Silicon Array of Position Sensitive Detectors. Sensors. 2010; 10(9):8173-8184.

Chicago/Turabian Style

Contreras, Javier; Costa, Daniel; Pereira, Sonia; Fortunato, Elvira; Martins, Rodrigo; Wierzbicki, Rafal; Heerlein, Holger; Ferreira, Isabel. 2010. "Micro Cantilever Movement Detection with an Amorphous Silicon Array of Position Sensitive Detectors." Sensors 10, no. 9: 8173-8184.

Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert