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Sensors 2010, 10(9), 8173-8184; doi:10.3390/s100908173

Micro Cantilever Movement Detection with an Amorphous Silicon Array of Position Sensitive Detectors

1,* , 1
1 CENIMAT, Department of Materials Science, Faculty of Science and Technology of New University of Lisbon and CEMOP/UNINOVA, Campus da Caparica, 2928-516 Caparica, Portugal 2 NASCATEC GmbH, Ludwig-Erhard-Str. 10, 34131 Kassel, Germany
* Authors to whom correspondence should be addressed.
Received: 23 June 2010 / Revised: 30 July 2010 / Accepted: 30 August 2010 / Published: 1 September 2010
(This article belongs to the Special Issue Photodetectors and Imaging Technologies)
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The movement of a micro cantilever was detected via a self constructed portable data acquisition prototype system which integrates a linear array of 32 1D amorphous silicon position sensitive detectors (PSD). The system was mounted on a microscope using a metal structure platform and the movement of the 30  µm wide by 400  µm long cantilever was tracked by analyzing the signals acquired by the 32 sensor array electronic readout system and the relevant data algorithm. The obtained results show a linear behavior of the photocurrent relating X and Y movement, with a non-linearity of about 3%, a spatial resolution of less than 2 µm along the lateral dimension of the sensor as well as of less than 3 µm along the perpendicular dimension of the sensor, when detecting just the micro-cantilever, and a spatial resolution of less than 1 µm when detecting the holding structure.
Keywords: amorphous semiconductors; silicon; devices; systems amorphous semiconductors; silicon; devices; systems
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Contreras, J.; Costa, D.; Pereira, S.; Fortunato, E.; Martins, R.; Wierzbicki, R.; Heerlein, H.; Ferreira, I. Micro Cantilever Movement Detection with an Amorphous Silicon Array of Position Sensitive Detectors. Sensors 2010, 10, 8173-8184.

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