Abstract: The movement of a micro cantilever was detected via a self constructed portable data acquisition prototype system which integrates a linear array of 32 1D amorphous silicon position sensitive detectors (PSD). The system was mounted on a microscope using a metal structure platform and the movement of the 30 µm wide by 400 µm long cantilever was tracked by analyzing the signals acquired by the 32 sensor array electronic readout system and the relevant data algorithm. The obtained results show a linear behavior of the photocurrent relating X and Y movement, with a non-linearity of about 3%, a spatial resolution of less than 2 µm along the lateral dimension of the sensor as well as of less than 3 µm along the perpendicular dimension of the sensor, when detecting just the micro-cantilever, and a spatial resolution of less than 1 µm when detecting the holding structure.
This is an open access article distributed under the
Creative Commons Attribution License which permits unrestricted use, distribution,
and reproduction in any medium, provided the original work is properly cited.
Export to BibTeX
MDPI and ACS Style
Contreras, J.; Costa, D.; Pereira, S.; Fortunato, E.; Martins, R.; Wierzbicki, R.; Heerlein, H.; Ferreira, I. Micro Cantilever Movement Detection with an Amorphous Silicon Array of Position Sensitive Detectors. Sensors 2010, 10, 8173-8184.
Contreras J, Costa D, Pereira S, Fortunato E, Martins R, Wierzbicki R, Heerlein H, Ferreira I. Micro Cantilever Movement Detection with an Amorphous Silicon Array of Position Sensitive Detectors. Sensors. 2010; 10(9):8173-8184.
Contreras, Javier; Costa, Daniel; Pereira, Sonia; Fortunato, Elvira; Martins, Rodrigo; Wierzbicki, Rafal; Heerlein, Holger; Ferreira, Isabel. 2010. "Micro Cantilever Movement Detection with an Amorphous Silicon Array of Position Sensitive Detectors." Sensors 10, no. 9: 8173-8184.