Sensors 2010, 10(7), 7044-7056; doi:10.3390/s100707044
Article

Investigation of the Frequency Shift of a SAD Circuit Loop and the Internal Micro-Cantilever in a Gas Sensor

Received: 15 June 2010; in revised form: 30 June 2010 / Accepted: 10 July 2010 / Published: 23 July 2010
(This article belongs to the Special Issue Intelligent Sensors - 2010)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: Micro-cantilever sensors for mass detection using resonance frequency have attracted considerable attention over the last decade in the field of gas sensing. For such a sensing system, an oscillator circuit loop is conventionally used to actuate the micro-cantilever, and trace the frequency shifts. In this paper, gas experiments are introduced to investigate the mechanical resonance frequency shifts of the micro-cantilever within the circuit loop(mechanical resonance frequency, MRF) and resonating frequency shifts of the electric signal in the oscillator circuit (system working frequency, SWF). A silicon beam with a piezoelectric zinc oxide layer is employed in the experiment, and a Self-Actuating-Detecting (SAD) circuit loop is built to drive the micro-cantilever and to follow the frequency shifts. The differences between the two resonating frequencies and their shifts are discussed and analyzed, and a coefficientrelated to the two frequency shifts is confirmed.Micro-cantilever sensors for mass detection using resonance frequency have attracted considerable attention over the last decade in the field of gas sensing. For such a sensing system, an oscillator circuit loop is conventionally used to actuate the micro-cantilever, and trace the frequency shifts. In this paper, gas experiments are introduced to investigate the mechanical resonance frequency shifts of the micro-cantilever within the circuit loop(mechanical resonance frequency, MRF) and resonating frequency shifts of the electric signal in the oscillator circuit (system working frequency, SWF). A silicon beam with a piezoelectric zinc oxide layer is employed in the experiment, and a Self-Actuating-Detecting (SAD) circuit loop is built to drive the micro-cantilever and to follow the frequency shifts. The differences between the two resonating frequencies and their shifts are discussed and analyzed, and a coefficientrelated to the two frequency shifts is confirmed.
Keywords: micro-cantilever; gas sensor; frequency shift; oscillator loop
PDF Full-text Download PDF Full-Text [426 KB, uploaded 21 June 2014 03:05 CEST]

Export to BibTeX |
EndNote


MDPI and ACS Style

Guan, L.; Zhao, J.; Yu, S.; Li, P.; You, Z. Investigation of the Frequency Shift of a SAD Circuit Loop and the Internal Micro-Cantilever in a Gas Sensor. Sensors 2010, 10, 7044-7056.

AMA Style

Guan L, Zhao J, Yu S, Li P, You Z. Investigation of the Frequency Shift of a SAD Circuit Loop and the Internal Micro-Cantilever in a Gas Sensor. Sensors. 2010; 10(7):7044-7056.

Chicago/Turabian Style

Guan, Liu; Zhao, Jiahao; Yu, Shijie; Li, Peng; You, Zheng. 2010. "Investigation of the Frequency Shift of a SAD Circuit Loop and the Internal Micro-Cantilever in a Gas Sensor." Sensors 10, no. 7: 7044-7056.

Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert