Sensors 2010, 10(7), 7044-7056; doi:10.3390/s100707044
Article

Investigation of the Frequency Shift of a SAD Circuit Loop and the Internal Micro-Cantilever in a Gas Sensor

Department of Precision Instruments and Mechanics, Tsinghua University, Beijing 100084, China
* Author to whom correspondence should be addressed.
Received: 15 June 2010; in revised form: 30 June 2010 / Accepted: 10 July 2010 / Published: 23 July 2010
(This article belongs to the Special Issue Intelligent Sensors - 2010)
PDF Full-text Download PDF Full-Text [426 KB, uploaded 23 July 2010 08:57 CEST]
Abstract: Micro-cantilever sensors for mass detection using resonance frequency have attracted considerable attention over the last decade in the field of gas sensing. For such a sensing system, an oscillator circuit loop is conventionally used to actuate the micro-cantilever, and trace the frequency shifts. In this paper, gas experiments are introduced to investigate the mechanical resonance frequency shifts of the micro-cantilever within the circuit loop(mechanical resonance frequency, MRF) and resonating frequency shifts of the electric signal in the oscillator circuit (system working frequency, SWF). A silicon beam with a piezoelectric zinc oxide layer is employed in the experiment, and a Self-Actuating-Detecting (SAD) circuit loop is built to drive the micro-cantilever and to follow the frequency shifts. The differences between the two resonating frequencies and their shifts are discussed and analyzed, and a coefficientrelated to the two frequency shifts is confirmed.Micro-cantilever sensors for mass detection using resonance frequency have attracted considerable attention over the last decade in the field of gas sensing. For such a sensing system, an oscillator circuit loop is conventionally used to actuate the micro-cantilever, and trace the frequency shifts. In this paper, gas experiments are introduced to investigate the mechanical resonance frequency shifts of the micro-cantilever within the circuit loop(mechanical resonance frequency, MRF) and resonating frequency shifts of the electric signal in the oscillator circuit (system working frequency, SWF). A silicon beam with a piezoelectric zinc oxide layer is employed in the experiment, and a Self-Actuating-Detecting (SAD) circuit loop is built to drive the micro-cantilever and to follow the frequency shifts. The differences between the two resonating frequencies and their shifts are discussed and analyzed, and a coefficientrelated to the two frequency shifts is confirmed.
Keywords: micro-cantilever; gas sensor; frequency shift; oscillator loop

Article Statistics

Load and display the download statistics.

Citations to this Article

Cite This Article

MDPI and ACS Style

Guan, L.; Zhao, J.; Yu, S.; Li, P.; You, Z. Investigation of the Frequency Shift of a SAD Circuit Loop and the Internal Micro-Cantilever in a Gas Sensor. Sensors 2010, 10, 7044-7056.

AMA Style

Guan L, Zhao J, Yu S, Li P, You Z. Investigation of the Frequency Shift of a SAD Circuit Loop and the Internal Micro-Cantilever in a Gas Sensor. Sensors. 2010; 10(7):7044-7056.

Chicago/Turabian Style

Guan, Liu; Zhao, Jiahao; Yu, Shijie; Li, Peng; You, Zheng. 2010. "Investigation of the Frequency Shift of a SAD Circuit Loop and the Internal Micro-Cantilever in a Gas Sensor." Sensors 10, no. 7: 7044-7056.

Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert