Next Article in Journal
Two-channel Hyperspectral LiDAR with a Supercontinuum Laser Source
Next Article in Special Issue
A Field Programmable Gate Array-Based Reconfigurable Smart-Sensor Network for Wireless Monitoring of New Generation Computer Numerically Controlled Machines
Previous Article in Journal
Fluorescent Chemosensors for Toxic Organophosphorus Pesticides: A Review
Previous Article in Special Issue
Study on a Two-Dimensional Scanning Micro-Mirror and Its Application in a MOEMS Target Detector
Sensors 2010, 10(7), 7044-7056; doi:10.3390/s100707044
Article

Investigation of the Frequency Shift of a SAD Circuit Loop and the Internal Micro-Cantilever in a Gas Sensor

,
* ,
,
 and
Department of Precision Instruments and Mechanics, Tsinghua University, Beijing 100084, China
* Author to whom correspondence should be addressed.
Received: 15 June 2010 / Revised: 30 June 2010 / Accepted: 10 July 2010 / Published: 23 July 2010
(This article belongs to the Special Issue Intelligent Sensors - 2010)

Abstract

Micro-cantilever sensors for mass detection using resonance frequency have attracted considerable attention over the last decade in the field of gas sensing. For such a sensing system, an oscillator circuit loop is conventionally used to actuate the micro-cantilever, and trace the frequency shifts. In this paper, gas experiments are introduced to investigate the mechanical resonance frequency shifts of the micro-cantilever within the circuit loop(mechanical resonance frequency, MRF) and resonating frequency shifts of the electric signal in the oscillator circuit (system working frequency, SWF). A silicon beam with a piezoelectric zinc oxide layer is employed in the experiment, and a Self-Actuating-Detecting (SAD) circuit loop is built to drive the micro-cantilever and to follow the frequency shifts. The differences between the two resonating frequencies and their shifts are discussed and analyzed, and a coefficientrelated to the two frequency shifts is confirmed.Micro-cantilever sensors for mass detection using resonance frequency have attracted considerable attention over the last decade in the field of gas sensing. For such a sensing system, an oscillator circuit loop is conventionally used to actuate the micro-cantilever, and trace the frequency shifts. In this paper, gas experiments are introduced to investigate the mechanical resonance frequency shifts of the micro-cantilever within the circuit loop(mechanical resonance frequency, MRF) and resonating frequency shifts of the electric signal in the oscillator circuit (system working frequency, SWF). A silicon beam with a piezoelectric zinc oxide layer is employed in the experiment, and a Self-Actuating-Detecting (SAD) circuit loop is built to drive the micro-cantilever and to follow the frequency shifts. The differences between the two resonating frequencies and their shifts are discussed and analyzed, and a coefficientrelated to the two frequency shifts is confirmed.
Keywords: micro-cantilever; gas sensor; frequency shift; oscillator loop micro-cantilever; gas sensor; frequency shift; oscillator loop
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).
SciFeed

Share & Cite This Article

Further Mendeley | CiteULike
Export to BibTeX |
EndNote |
RIS
MDPI and ACS Style

Guan, L.; Zhao, J.; Yu, S.; Li, P.; You, Z. Investigation of the Frequency Shift of a SAD Circuit Loop and the Internal Micro-Cantilever in a Gas Sensor. Sensors 2010, 10, 7044-7056.

View more citation formats

Related Articles

Article Metrics

For more information on the journal, click here

Comments

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert