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Sensors 2010, 10(3), 2348-2358; doi:10.3390/s100302348
Article

Refractive Index Sensor Based on a 1D Photonic Crystal in a Microfluidic Channel

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Received: 27 January 2010 / Revised: 10 February 2010 / Accepted: 5 March 2010 / Published: 22 March 2010
(This article belongs to the Special Issue State-of-the-Art Sensors Technology in Denmark)
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Abstract

A refractive index sensor has been fabricated in silicon oxynitride by standard UV lithography and dry etching processes. The refractive index sensor consists of a 1D photonic crystal (PhC) embedded in a microfluidic channel addressed by fiber-terminated planar waveguides. Experimental demonstrations performed with several ethanol solutions ranging from a purity of 96.00% (n = 1.36356) to 95.04% (n = 1.36377) yielded a sensitivity (Δλ/Δn) of 836 nm/RIU and a limit of detection (LOD) of 6 x 10-5 RIU, which is, however, still one order of magnitude higher than the theoretical lower limit of the limit of detection 1.3 x 10–6 RIU.
Keywords: 1D photonic crystal; refractive index sensor; integrated waveguides; electrochromatography 1D photonic crystal; refractive index sensor; integrated waveguides; electrochromatography
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Nunes, P.S.; Mortensen, N.A.; Kutter, J.P.; Mogensen, K.B. Refractive Index Sensor Based on a 1D Photonic Crystal in a Microfluidic Channel. Sensors 2010, 10, 2348-2358.

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