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Journal: Sensors, 2010
Volume: 10
Page(s): 10524-10544
10524-10544
Article: Optimal and Robust Design Method for Two-Chip Out-of-Plane Microaccelerometers
Lee, S.; Ko, H.; Choi, B.; Cho, D.-I.

http://www.mdpi.com/1424-8220/10/12/10524

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