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Journal: Int. J. Mol. Sci., 2009
Volume: 10
Number: 4498

Article: In-TFT-Array-Process Micro Defect Inspection Using Nonlinear Principal Component Analysis
Authors: by Yi-Hung Liu, Chi-Kai Wang, Yung Ting, Wei-Zhi Lin, Zhi-Hao Kang, Ching-Shun Chen and Jih-Shang Hwang
Link: https://www.mdpi.com/1422-0067/10/10/4498

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