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Entropy 2016, 18(8), 308; doi:10.3390/e18080308

Soft Magnetic Properties of High-Entropy Fe-Co-Ni-Cr-Al-Si Thin Films

1
Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan
2
Department of Materials Science and Engineering, Feng Chia University, Taichung 40724, Taiwan
*
Author to whom correspondence should be addressed.
Academic Editors: Kevin H. Knuth and Adom Giffin
Received: 20 July 2016 / Revised: 6 August 2016 / Accepted: 16 August 2016 / Published: 18 August 2016
(This article belongs to the Special Issue High-Entropy Alloys and High-Entropy-Related Materials)
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Abstract

Soft magnetic properties of Fe-Co-Ni-Al-Cr-Si thin films were studied. As-deposited Fe-Co-Ni-Al-Cr-Si nano-grained thin films showing no magnetic anisotropy were subjected to field-annealing at different temperatures to induce magnetic anisotropy. Optimized magnetic and electrical properties of Fe-Co-Ni-Al-Cr-Si films annealed at 200 °C are saturation magnetization 9.13 × 105 A/m, coercivity 79.6 A/m, out-of-plane uniaxial anisotropy field 1.59 × 103 A/m, and electrical resistivity 3.75 μΩ·m. Based on these excellent properties, we employed such films to fabricate magnetic thin film inductor. The performance of the high entropy alloy thin film inductors is superior to that of air core inductor. View Full-Text
Keywords: high-entropy alloys; magnetic sputtering; thin films; magnetic property; electrical resistivity high-entropy alloys; magnetic sputtering; thin films; magnetic property; electrical resistivity
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Lin, P.-C.; Cheng, C.-Y.; Yeh, J.-W.; Chin, T.-S. Soft Magnetic Properties of High-Entropy Fe-Co-Ni-Cr-Al-Si Thin Films. Entropy 2016, 18, 308.

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