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Entropy 2014, 16(1), 405-417; doi:10.3390/e16010405
Article

Nanomechanical Properties and Deformation Behaviors of Multi-Component (AlCrTaTiZr)NxSiy High-Entropy Coatings

,
* ,
 and
Department of Materials Science and Engineering, National Chung Hsing University, Taichung 40227, Taiwan
* Author to whom correspondence should be addressed.
Received: 27 September 2013 / Revised: 20 November 2013 / Accepted: 18 December 2013 / Published: 31 December 2013
(This article belongs to the Special Issue High Entropy Alloys)
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Abstract

In this study multi-component (AlCrTaTiZr)NxSiy high-entropy coatings were developed by co-sputtering of AlCrTaTiZr alloy and Si in an Ar/N2 mixed atmosphere with the application of different substrate biases and Si-target powers. Their nanomechanical properties and deformation behaviors were characterized by nanoindentation tests. Because of the effect of high mixing entropies, all the deposited multi-component (AlCrTaTiZr)NxSiy high-entropy coatings exhibited a simple face-centered cubic solid-solution structure. With an increased substrate bias and Si-target power, their microstructures changed from large columns with a [111] preferred orientation to a nanocomposite form with ultrafine grains. The hardness, H/E ratio and H3/E2 ratio of (AlCrTaTiZr)N1.07Si0.15 coating reached 30.2 GPa, 0.12 and 0.41 GPa, respectively, suggesting markedly suppressed dislocation activities and a very high resistance to wear and plastic deformation, attributable to grain refinements and film densification by the application of substrate bias, a nanocomposite structure by the introduction of silicon nitrides, and a strengthening effect induced by severe lattice distortions. In the deformed regions under indents, stacking faults or partial dislocations were formed, while in the stress-released regions, near-perfect lattices recovered.
Keywords: multi-component; high-entropy alloy; nanomechanical property; deformation multi-component; high-entropy alloy; nanomechanical property; deformation
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Lin, S.-Y.; Chang, S.-Y.; Chang, C.-J.; Huang, Y.-C. Nanomechanical Properties and Deformation Behaviors of Multi-Component (AlCrTaTiZr)NxSiy High-Entropy Coatings. Entropy 2014, 16, 405-417.

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